This article is cited in 1 paper

MEETINGS AND CONFERENCES

X-ray lithography in synchrotron radiation beams

Yu. M. Aleksandrov, A. D. Krivospitskiy, M. N. Yakimenko


UDC: 539.122.2 (048)

PACS: 01.10.Fv

DOI: 10.3367/UFNr.0128.197905i.0180

 English version: Physics–Uspekhi, 1979, 22:5, 383–384