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JOURNALS // Uspekhi Fizicheskikh Nauk // Archive
UFN, 1983 Volume 140, Number 4, Pages 737–738 (Mi ufn8695)
BIBLIOGRAPHY

Ion implantation techniques

V. S. Vavilov


UDC: 537.311.33(049.3)

DOI: 10.3367/UFNr.0140.198308l.0737


© Steklov Math. Inst. of RAS, 2026