V. S. Vavilov, “Ion implantation: equipment and techniques”, UFN, 1984, Volume 143, Number 2,Pages <nobr>336

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UFN, 1984 Volume 143, Number 2, Pages 336–337 (Mi ufn8502)

BIBLIOGRAPHY

Ion implantation: equipment and techniques

V. S. Vavilov

UDC: 537.311.33(049.3)

DOI: 10.3367/UFNr.0143.198406s.0336