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JOURNALS // Uspekhi Fizicheskikh Nauk // Archive

UFN, 1988 Volume 156, Number 3, Pages 552–553 (Mi ufn7881)

This article is cited in 3 papers

BIBLIOGRAPHY

VLSI technology: fundamentals and applications

Yu. V. Gulyaev, Yu. L. Kopylov


UDC: 621.3.049.77.14(049.3)

PACS: 85.40.Hp, 01.30.Vv, 85.40.Bh, 85.40.Qx

DOI: 10.3367/UFNr.0156.198811i.0552


 English version:
Physics–Uspekhi, 1988, 31:11, 1040–1041


© Steklov Math. Inst. of RAS, 2026