This article is cited in 9 papers

REVIEWS OF TOPICAL PROBLEMS

Multilayer X-ray interference structures

V. V. Lider

Federal Scientific Research Center "Crystallography and Photonics", Russian Academy of Sciences, Shubnikov Institute for Crystallography, Moscow

Abstract: Functional principles, current status, and problems of multilayer X-ray optics are reviewed. Methods to optimize planar multilayer interference structures and multilayer diffraction gratings and their application in academic research and technology are discussed.

Keywords: multilayer systems, diffraction gratings, X-rays, X-ray optics, diffraction, interference, spectral resolution.

PACS: 07.85.-m, 41.50.+h, 42.79.Dj, 42.88.+h, 61.05.cp, 78.20.Bh, 78.67.Pt, 95.55.Ka

Received: July 12, 2018
Revised: September 24, 2018
Accepted: October 4, 2018

DOI: 10.3367/UFNr.2018.10.038439

 English version: Physics–Uspekhi, 2019, 62:11, 1063–1095

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