This article is cited in 40 papers

INSTRUMENTS AND METHODS OF INVESTIGATION

3D printing methods for micro- and nanostructures

K. Fritzler, V. Ya. Prinz

Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk

Abstract: The physical and physicochemical fundamentals of three-dimensional (3D) micro- and nanoprinting are presented. 3D printing (or additive manufacturing technology) is a process which fabricates structures and devices by depositing material (usually layer by layer) according to a 3D digital model. The methods and results reviewed here are limited to those from micro- and nanoscale fields, which are in demand in the fields of electronics, photonics, and bionics. Special attention is given to methods for fabricating sub-100-nm structures, including single- and two-photon polymerization stereolithography, electrohydrodynamic inkjet printing, and laser-induced forward transfer. The advantages and disadvantages of 3D printing methods are discussed, together with prospects for their development and application.

Keywords: 3D printing, additive technologies, 3D nanostructures, stereolithography, two-photon polymerization, inkjet printing, electrohydrodynamic printing, laser-induced forward transfer.

PACS: 32.80.Rm, 42.82.Cr, 61.46.-w, 68.65.-k, 81.20.-n

Received: June 5, 2017
Accepted: November 10, 2017

DOI: 10.3367/UFNr.2017.11.038239

 English version: Physics–Uspekhi, 2019, 62:1, 54–69

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