This article is cited in 37 papers

INSTRUMENTS AND METHODS OF INVESTIGATION

Aperiodic multilayer structures in soft X-ray optics

A. S. Pirozhkov^a, E. N. Ragozin<sup>bc

a</sup> Kansai Photon Science Institute, Japan Atomic Energy Agency, Kyoto
^b Lebedev Physical Institute, Russian Academy of Sciences, Moscow
^c Moscow Institute of Physics and Technology (State University), Dolgoprudny, Moscow region

Abstract: We review a series of studies that address the development and application of aperiodic multilayer structures (aperiodic multilayer mirrors) as soft X-ray (SXR) ($\lambda\approx~4$–$40$ nm) optical elements. We discuss the potential of such structures for reflecting SXR radiation in a broad wavelength range, primarily at normal radiation incidence, and as polarization elements (broadband polarizer mirrors and phase shifters). The results of multiparametric optimization are presented, and experimental data for aperiodic Mo/Si ($\lambda\ge 12.5$ nm) multilayer mirrors are outlined. The feasibility of advancing to the $\lambda\le 12.5$ nm domain by using other materials is examined, and the capabilities of aperiodic structures as elements of attosecond SXR optics are discussed.

Keywords: soft X-ray/EUV optics, aperiodic multilayer structures, broadband multilayer mirrors, polarization optics, attosecond optical elements, imaging spectrometers.

PACS: 07.60.-j, 42.30.-d, 42.79.-e

Received: August 25, 2015
Accepted: September 8, 2015

DOI: 10.3367/UFNr.0185.201511e.1203

 English version: Physics–Uspekhi, 2015, 58:11, 1095–1105

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