This article is cited in 23 papers

REVIEWS OF TOPICAL PROBLEMS

High-resolution X-ray diffraction in crystalline structures with quantum dots

V. I. Punegov

Komi Scientific Center, Ural Branch of the Russian Academy of Sciences

Abstract: We review the current status of nondestructive high-resolution X-ray diffractometry research on semiconductor structures with quantum dots (QDs). The formalism of the statistical theory of diffraction is used to consider the coherent and diffuse X-ray scattering in crystalline systems with nanoinclusions. Effects of the shape, elastic strain, and lateral and vertical QD correlation on the diffuse scattering angular distribution near the reciprocal lattice nodes are considered. Using short-period and multicomponent superlattices as an example, we demonstrate the efficiency of data-assisted simulations in the quantitative analysis of nanostructured materials.

Keywords: high-resolution X-ray diffraction, coherent and diffuse scattering, superlattice, quantum dots.

PACS: 61.05.C-, 68.65.-k

Received: January 9, 2015
Revised: February 8, 2015
Accepted: February 10, 2015

DOI: 10.3367/UFNr.0185.201505a.0449

 English version: Physics–Uspekhi, 2015, 58:5, 419–445

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