This article is cited in 27 papers

CONFERENCES AND SYMPOSIA

Research and development in short-wave radiation sources for new-generation lithography

K. N. Koshelev^a, V. E. Banine^b, N. N. Salashchenko<sup>c

a</sup> Institute of Spectroscopy, Russian Academy of Sciences
^b ASML, Veldhoven, The Netherlands
^c Institute for Physics of Microstructures, Russian Academy of Sciences

PACS: 42.72.-g, 42.82.Cr

DOI: 10.3367/UFNr.0177.200707h.0777

 English version: Physics–Uspekhi, 2007, 50:7, 741–744

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