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JOURNALS // Uspekhi Fizicheskikh Nauk // Archive

UFN, 2013 Volume 183, Number 7, Pages 673–718 (Mi ufn4398)

This article is cited in 94 papers

REVIEWS OF TOPICAL PROBLEMS

Laser applications in nanotechnology: nanofabrication using laser ablation and laser nanolithography

G. N. Makarov

Institute of Spectroscopy, Russian Academy of Sciences

Abstract: The fact that nanoparticles and nanomaterials have fundamental properties different both from their constituent atoms or molecules and from their bulk counterparts has stimulated great interest, both theoretical and practical, in nanoparticles and nanoparticle-based assemblies (functional materials), with the result that these structures have become the subject of explosive research over the last twenty years or so. A great deal of progress in this field has relied on the use of lasers. In this paper, the directions followed and results obtained in laser nanotechnology research are reviewed. The parameters, properties, and applications of nanoparticles are discussed, along with the physical and chemical methods for their fabrication and investigation. Nanofabrication applications of and fundamental physical principles behind laser ablation and laser nanolithography are discussed in detail. The applications of laser radiation are shown to range from fabricating, melting, and evaporating nanoparticles to changing their shape, structure, size, and size distribution, through studying their dynamics and forming them into periodic arrays and various structures and assemblies. The historical development of research on nanoparticles and nanomaterials and the application of laser nanotechnology in various fields are briefly reviewed.

Keywords: Atoms, molecules, clusters nanoparticles, nanostructures, nanomaterials, graphene, laser generation of nanoparticles and nanostructures, laser nanolithography, laser melting of nanoparticles, laser nanotechnologies.

PACS: 36.40.-c, 42.62.Fi, 61.46.-w, 81.05.ue, 81.07.-b, 81.16.-c, 81.16.Nd

Received: July 25, 2012
Revised: January 17, 2013
Accepted: January 22, 2013

DOI: 10.3367/UFNr.0183.201307a.0673


 English version:
Physics–Uspekhi, 2013, 56:7, 643–682

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