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JOURNALS // Uspekhi Fizicheskikh Nauk // Archive

UFN, 2003 Volume 173, Number 6, Pages 609–648 (Mi ufn2143)

This article is cited in 101 papers

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Generation of cluster beams

B. M. Smirnov

Institute for High Temperatures, Russian Academy of Sciences

Abstract: The processes are considered in a cluster plasma consisting of a dense plasma of a buffer gas and a metal admixture. These processes involving clusters in a gas or plasma include nucleation processes in a supersaturated vapor, formation of metallic clusters in a dense gas from metal-containing compounds, and chemical processes in the course of this conversion, processes of cluster charging in a plasma and under the action of an electron beam. The basic methods are analyzed for cluster generation including formation and growth of clusters in free jet expansion of a gas, under laser action on the metallic surface, and growth of clusters in a plasma resulted from injection of metal-containing molecules into a plasma. Some applications of cluster beams are discussed, which include fabrication of thin films, new materials, and creation of a hot nonuniform plasma.

PACS: 36.40.Sx, 36.40.Wa, 52.50.Jm, 61.46.+w

Received: December 15, 2002
Revised: April 17, 2003

DOI: 10.3367/UFNr.0173.200306b.0609


 English version:
Physics–Uspekhi, 2003, 46:6, 589–628

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