Abstract:
According to direct kinetic measurements under conditions of a positive column of a low-pressure glow discharge, the probabilities of recombination of oxygen atoms $(\gamma)$ on an aluminum foil surface have been determined and the effective activation energies of the recombination process have been calculated. It has been found that the $\gamma$ value depends on the gas pressure in the system at a discharge current above $30$ mA. The fluxes of the main active components of oxygen plasma onto the plasma-bounding surface have been calculated. It has been shown that an increase in the heterogeneous recombination probability is attributed to an increase in the flux of metastable oxygen molecules $\mathrm{O}_2(b^1\Sigma_g^+)$ onto the surface.
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