Abstract:
A low-pressure glow discharge in a transverse supersonic gas flow was experimentally studied
for the case where the flow only partially fills the interelectrode gap. It is shown that the space region with
supersonic gas flow has a higher concentration of gas particles and, therefore, works as a charged particle
generator. The near-electrode regions of glow discharge are concentrated specifically in this region. This
structure of glow discharge is promising for plasma deposition of coatings under ultralow pressures.
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