This article is cited in 7 papers

Plasma Investigations

3D Simulation of Electrodynamics of a Microwave Low Pressure Discharge

Yu. A. Lebedev, A. V. Tatarinov, I. L. Epshtein

A. V. Topchiev Institute of Petrochemical Synthesis, Russian Academy of Sciences, Moscow

Abstract: The structure of microwave fields in a discharge chamber used for obtaining electrode microwave discharge is investigated. It is shown that $3D$–simulation allows quantitatively determining the optimumal structural parts of the discharge chamber for discharge generation. The represented results of self-consistent simulation of the discharge in nitrogen and hydrogen at a pressure of $1$ torr are qualitatively consistent with experimental results.

UDC: 533.9.01

Received: 14.09.2010

 English version: High Temperature, 2011, 49:6, 775–787

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