Abstract:
Results are presented of study of electrical and optical characteristics of plasma of short glow discharge in the spherical-anode–plane-cathode electrode system at an interelectrode gap of $3$ cm. Low-pressure ($p = 150$–$1500$ Pa) $\mathrm{Ar}$–$\mathrm{SF}_6$ mixtures are investigated. Optimal conditions are revealed of the discharge radiation within the argon fluoride waveband with the maximum at $193$ nm. The electron kinetic coefficients are calculated for $92 : 8$ and $99 : 1$$\mathrm{Ar}$–$\mathrm{SF}_6$ mixtures; these mixtures are used in gas-discharge exciplex lamps.
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