This article is cited in 4 papers

Plasma Investigations

Heating of gas and polimeric material in low-temperature plasma of a high-frequency discharge

A. V. Markov, Yu. P. Yulenets

State Technological Institute of St. Petersburg (Technical University)

Abstract: A model of the thermal process in high-frequency capacitive discharge plasma of low pressure in air is considered. The influence of the discharge power and pressure on the temperature distribution in the discharge gap (including the case where a polymer film sample is placed in it) is analyzed. The results of numerical calculations are compared with the data of direct measurements of the gas temperature in the discharge and the film temperature. An example of the practical use of the technique for calculating the temperature field in a discharge during plasma modification of a polymer surface is shown.

UDC: 537.532.74

Received: 13.02.2014
Accepted: 05.11.2014

DOI: 10.7868/S0040364415020155

 English version: High Temperature, 2015, 53:2, 167–170

Bibliographic databases:

• 
• 
• 
•