Abstract:
Methods are analyzed of maintaining plasma in low-pressure electron-cyclotron-resonance reactors in which the ionization is caused by fast electrons blocked in traps developed by permanent magnets. The key part played by zones of electron-cyclotron heating of electrons by the electric field of the wave is treated. The mathematical simulation of the electron motion in magnetic traps is used to investigate the effect of the size of magnetic traps on the efficiency of heating, and the principles of designing electron-cyclotron-resonance plasma MW (microwave-frequency) reactors are formulated.
Fulltext:
PDF file (1352 kB)
