This article is cited in 3 papers

On the functioning of a VHF microelectromechanical resonator

E. G. Kostsov^a, S. I. Fadeev<sup>b

a</sup> Institute of Automation and Electrometry SB RAS, 1 Koptyug av., 630090 Novosibirsk
^b Sobolev Institute of Mathematics SB RAS, 4 Koptyug av., 630090 Novosibirsk

Abstract: We consider a new design of a microelectromechanical resonator with micrometer dimensions operating at gigahertz frequencies, previously proposed by the authors. The article contains a description of technological problems of the realization of a microelectromechanical resonator as well as a rigorous justification of its functioning in a mathematical model. In analytical form, we establish a connection between auto-oscillations of the mobile element of the microresonator generated by electrostatic attraction during startup, and the parameters of the natural oscillations which turn into auto-oscillations at the end of the startup.

Keywords: VHF MEMS, microresonator, frequency generator, electrostatic attraction, auto-oscillation, phase portrait, rigidity of a spring.

UDC: 519.63+621.37+621.382

Received: 27.07.2013

Bibliographic databases:

•