Algorithm for controlling the process of spraying optical coatings based on sample broadband measurement data

V. D. Shinkarev^a, D. V. Lukyanenko^a, A. V. Tikhonravov^b, A. G. Yagola<sup>a

a</sup> M. V. Lomonosov Moscow State University, Leninskie gory 1, build. 2, Moscow 119991, Russia
^b MSU Research Computing Center, Leninskie gory 1, build. 4, Moscow 119234, Russia

Abstract: An algorithm for controlling the deposition process of optical coatings based on the analysis of sample data of broadband measurements for a fixed set of wavelengths is considered. The considered algorithm uses broadband measurement data on the one hand, which is an advantage compared to using only monochromatic measurement data for one fixed wavelength, and on the other hand is fast-acting compared to algorithms using full broadband measurement data. It is demonstrated that the proposed algorithm makes it possible to obtain sufficiently accurate estimates of the thicknesses of layers of sprayed multilayer optical coatings.

Keywords: optical coatings, coating spraying, broadband control, monochromatic control.

UDC: 519.6

Received: 02.04.2023
Revised: 24.04.2023
Accepted: 27.04.2023

DOI: 10.33048/SIBJIM.2023.26.313

 English version: Journal of Applied and Industrial Mathematics, 2023, 17:3, 608–615