This article is cited in 4 papers

The Deposition of Epitaxial Layers from the Vapour of Organometallic Compounds

B. V. Zhuk

Institute of Chemistry, Academy of Sciences of the USSR, Gor'kii

Abstract: Different methods of depositing epitaxial layers from the vapour of organometallic compounds have been compared. The stability of the deposition processes and new data on the preparation of epitaxial layers of A^IIIB^V, A^IIB^VI, and A^IVB^VI compounds have been examined.
The bibliography contains 206 references.

UDC: 621.793.1:547.113

DOI: 10.1070/RC1985v054n08ABEH003110

 English version: Russian Chemical Reviews, 1985, 54:8, 770–785

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