This article is cited in 10 papers

Kinetics and Catalysis of the Oxidation of Titanium, Silicon, Germanium, and Gallium Arsenide

N. P. Peksheva, V. M. Strukov

Voronezh Polytechnic Institute

Abstract: A systematic account is given of the results of studies of the kinetics and catalysis of thermal gas-phase oxidation reactions of titanium, silicon, germanium, and GaAs. The influence of various factors (the nature of the reactant gas, the method of the preliminary treatment of the surface, and the nature of the substance oxidised) on the reaction kinetics has been estimated. The characteristics of the catalysis of heterogeneous oxidative processes are discussed and new ways of solving a number of practical problems are outlined.
The bibliography includes 133 references.

UDC: 541.128.1

DOI: 10.1070/RC1979v048n11ABEH002431

 English version: Russian Chemical Reviews, 1979, 48:11, 1092–1108

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