Brief Communications

Investigation of the formation of diffraction gratings on the surface of optical waveguides

A. S. Svakhin, V. A. Sychugov, G. P. Shipulo


Abstract: A study was made of the processes of grating formation on glass by ion-beam etching through a photoresist mask. Freon (CF₄) was used as the working gas. It was found that careful monitoring of the shape of the mask is necessary if gratings with a given ruling profile are desired.

UDC: 621.372.8.09

PACS: 42.80.Fn, 42.80.Lt

Received: 29.11.1978

 English version: Soviet Journal of Quantum Electronics, 1979, 9:5, 645–647