This article is cited in 2 papers

Laser applications and other topics in quantum electronics

Analysis of the applications of the Schwarzschild objective in the soft x-ray and VUV spectral ranges. 2. Diffraction modelling of aberrations

A. A. Malyutin

Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow

Abstract: An analysis is reported of the use of the Schwarzschild objective in soft x-ray and VUV (2 — 20 nm) microscopy. Estimates are given of the influence of the objective alignment and of the precision of fabrication of spherical mirrors on the resolution of the objective (point spread function, line spread function, and modulation transfer function).

PACS: 42.15.Fr, 42.30.Lr, 42.79.Bh

Received: 29.07.1996

 English version: Quantum Electronics, 1997, 27:2, 182–184

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