This article is cited in 3 papers

Laser applications and other topics in quantum electronics

Analysis of the applications of the Schwarzschild objective in the soft x-ray and VUV spectral ranges. 1. Conditions for fifth-order aplanatism

A. A. Malyutin

Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow

Abstract: An analysis is reported of the use of the Schwarzschild objective in soft x-ray and VUV (2 — 20 nm) microscopy. The aplanatic conditions, including terms of the fifth order which ensure more accurate determination of the principal characteristics of the objective, are found for homocentric and heterocentric geometries.

PACS: 42.70.Ce, 42.62.Cf, 81.20.Zx

Received: 29.07.1996

 English version: Quantum Electronics, 1997, 27:1, 90–93

Bibliographic databases:

•