Laser applications and other topics in quantum electronics

Optical system for laser pantography

A. M. Bakiev, S. Kh. Valiev


Abstract: A description is given of an optical system for laser pantography and the results are reported of a surface treatment of semiconductor wafers. The width of microchannels formed by thermal processing reached 2 μm.

UDC: 621.378.325

PACS: 42.62.-b, 81.65.-b

Received: 02.08.1989

 English version: Soviet Journal of Quantum Electronics, 1990, 20:9, 1145–1146

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