This article is cited in 1 paper

Applications of lasers and other topics in quantum electronics

Dark-field laser projection microscope

A. M. Bakiev, S. Kh. Valiev, N. V. Kryazhev


Abstract: The results are reported of an experimental investigation of a dark-field laser projection microscope. Surfaces of different objects were investigated, including a laser mirror, a grid structure, laser-treated part of a film, etc. Microdefects of the substrates and surface structures were readily distinguished in the diffraction images of the objects.

UDC: 621.378.9:535.82

PACS: 07.60.Pb, 42.62.-b, 42.30.-d

Received: 16.11.1989

 English version: Soviet Journal of Quantum Electronics, 1990, 20:7, 871–872

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