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Letters to the editor

Laser computer-controlled phase microscope with a spatial resolution of 10 nm

V. P. Tychinskii, A. V. Tavrov


Abstract: It is shown that a super-Rayleigh spatial resolution can be realized in a phase image of an object. Measurements carried out using a computer-controlled phase microscope confirm the feasibility of determination of the coordinate of an abrupt change in the height of a semiconductor structure profile with an accuracy better than 10 nm.

UDC: 681.723:621.373.826

PACS: 07.60.Pb, 42.62.-b, 42.30.-d, 07.05.-t

Received: 27.10.1989

 English version: Soviet Journal of Quantum Electronics, 1990, 20:3, 206–207

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