This article is cited in 1 paper

Lasers

Pulse-periodic 600-W XeCl laser for industrial applications

V. M. Borisov, A. Yu. Vinokhodov, S. M. Gerasimov, E. V. Evstratov, Yu. B. Kiryukhin, S. G. Kuznetsov, Yu. Yu. Stepanov, V. A. Vizir', V. I. Manylov, S. P. Nosenko, S. P. Sychev, V. V. Chervyakov, N. G. Shubkin


Abstract: The results are given of the construction of a high-power excimer laser capable of generating λ = 308-nm radiation with an average power of ~ 600 W. The laser power supply system was based on four commercial thyratrons and a magnetic switch. As an example of an application of such a laser, the results are given of the formation of a structure of apertures in polyimide deposited on aluminum. A binary film of this type serves as a flexible substrate used to mount large-scale integrated circuits.

UDC: 621.373.826.038.823

PACS: 42.55.Lt, 42.62.Cf, 42.60.By, 42.79.Ag, 42.60.Jf

Received: 02.10.1990

 English version: Soviet Journal of Quantum Electronics, 1991, 21:2, 162–164

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