Laser applications and other topics in quantum electronics

Multibeam projection microinterferometer with an image amplifier

A. M. Bakiev, S. Kh. Valiev, N. V. Kryazhev


Abstract: An experimental investigation was made of the principal properties of a multibeam projection microinterferometer with a copper-vapor image amplifier. The optical system and the operating principle of the microinterferometer are described. It is shown that the lower limit of the height of a microstructure which can be determined is less than 10 nm. If the edges of the microstructure are sharp, the upper limit can reach 5λ, where λ = 0.5782 μm is the wavelength of the radiation of the copper-vapor image amplifier.

UDC: 621.373.826

PACS: 07.60.Ly, 42.79.Ls, 42.79.Bh

Received: 02.01.1992

 English version: Soviet Journal of Quantum Electronics, 1992, 22:8, 749–752

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