Laser apparatus for measuring the amplitudes and the resonance frequencies of vibrations of mechanical structure elements
R. A. Vanetsian, M. P. Tychinskaya, V. P. Zakharov, O. A. Nikolaeva, V. A. Tishchenko
Abstract:
An apparatus was developed for measuring the natural resonance frequencies and the amplitudes of vibrations of mechanical structure elements by a contactless method. The measurement method is described and the results are given of experimental investigations of elements of semiconductor devices.