This article is cited in 2 papers

Interaction of laser radiation with matter

IR multiphoton dissociation of trichlorosilane induced by pulsed CO₂ and NH₃ laser radiation

V. M. Apatin, V. B. Laptev, E. A. Ryabov

Institute of Spectroscopy, Russian Academy of Sciences, Troitsk, Moscow

Abstract: The IR multiphoton dissociation of trichlorosilane (SiHCl₃) molecules irradiated by pulses from CO₂ and NH₃ lasers is studied. The dependences of dissociation yield on the frequency and energy density of laser radiation, as well as on the parent pressure of SiHCl₃, are determined. It is found that HCl and a solid precipitate, probably with a common chemical formula (SiCl₂)_n, are the main products of dissociation of trichlorosilane.

PACS: 33.80.Gj, 28.60.+s

Received: 16.09.2002
Revised: 05.03.2003

 English version: Quantum Electronics, 2003, 33:10, 894–896

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