This article is cited in 18 papers

Special issue devoted to the 80th anniversary of academician N. G. Basov's birth

Multilayer X-ray optics

A. V. Vinogradov

P. N. Lebedev Physical Institute, Russian Academy of Sciences, Moscow

Abstract: The principles, state of the art, and problems of multilayer X-ray optics are analysed. Among its applications, the projection X-ray lithography and mirrors for a repetitively pulsed capillary-discharge X-ray laser are considered.

PACS: 07.85.Fv, 41.50.+h, 42.55.Vc, 85.40.Hp

Received: 23.09.2002

 English version: Quantum Electronics, 2002, 32:12, 1113–1121

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