Laser applications and system components

Laser crystallization of silicon coatings on flexible polymer substrates: effect of the absorbing layer metal

A. A. Serdobintsev, L. D. Volkovoynova

Saratov State University, 410012, Saratov, Russia

Abstract: The results of studying the effect of metal coatings on the process of silicon crystallization on flexible polymer substrates are presented. The study was conducted using such metals as aluminum, tin, nickel, and molybdenum as examples. Crystallization was carried out by the method of metal-induced laser-stimulated crystallization (MILSC). To determine the degree of influence of a metal on the crystallization process, the silicon structure after processing was investigated by the Raman scattering method.

Keywords: flexible electronics, silicon crystallization, metal-induced silicon crystallization, laser-stimulated silicon crystallization, IR pulsed laser.

Received: 02.08.2024

 English version: Quantum Electronics, 2024, 51:suppl. 12, S1084–S1089