On the occasion of the 90th anniversary of the Lebedev Physical Institute of the Russian Academy of Sciences

Reflectometry in the soft X-ray range with a laser-plasma radiation source

E. N. Ragozin

P. N. Lebedev Physical Institute, Russian Academy of Sciences, Moscow, Russia

Abstract: The design and application of reflectometers with a grazing incidence grating for the wavelength region shorter than 300 Å are discussed. The focus is on reflectometers with laser-produced plasma sources excited by a pulsed-periodic laser with "moderate" output parameters (pulse energy of 0.1 to 1 J, pulse duration of 10 ns or less). Our findings can be useful for the development of metrological facilities in the soft X-ray range of the spectrum, both laboratory-based and included in commercial production of integrated circuits by projection X-ray lithography.

Keywords: projection X-ray lithography, reflectometer, laser-produced plasma, Rowland grating, VLS grating, Hettrick–Underwood design, resolution, beam splitter, multilayer mirror.

Received: 29.08.2024
Revised: 27.09.2024

 English version: Quantum Electronics, 2024, 51:suppl. 12, S983–S993