Abstract:
Main parameters of a new scheme of a compact VUV grazing incidence spectrometer based on a plane amplitude diffraction grating are considered. The spectrometer will allow simultaneous detection of spectra at the +1st order diffraction edge with a sufficiently high (λ/δλ ~150) spectral resolution and in the -1st order with a moderate resolution (λ/δλ ~15–30), but in a very wide (5–200 nm) spectral range. The use of such a spectrometer is promising for measuring the absolute radiation yield in these spectral regions, which is necessary for the diagnostics and control of plasma radiation sources, including those intended for projection EUV nanolithography.
Keywords:VUV spectroscopy and radiometry, plasma diagnostics, VUV spectrometers, EUV nanolithography.
Fulltext:
PDF file (932 kB)
