This article is cited in 10 papers

Lasers

High-power, highly stable KrF laser with a 4-kHz pulse repetition rate

V. M. Borisov, A. V. El'tsov, O. B. Khristoforov

Troitsk Institute for Innovation and Fusion Research

Abstract: An electric-discharge KrF laser (248 nm) with an average output power of 300 W is developed and studied. A number of new design features are related to the use of a laser chamber based on an Al₂O₃ ceramic tube. A high power and pulse repetition rate are achieved by using a volume discharge with lateral preionisation by the UV radiation of a creeping discharge in the form of a homogeneous plasma sheet on the surface of a plane sapphire plate. Various generators for pumping the laser are studied. The maximum laser efficiency is 3.1%, the maximum laser energy is 160 mJ pulse^-1, and the pulse duration at half maximum is 7.5 ns. In the case of long-term operation at a pulse repetition rate of 4 kHz and an output power of 300 W, high stability of laser output energy (σ≤0.7%) is achieved using an all-solid-state pump system.

Keywords: excimer laser, KrF, preionisation, creeping discharge, ceramic laser chamber, C–C scheme, LC inverter, solid state pump system, high pulse repetition rate.

PACS: 42.55.Lt, 42.60.By, 42.60.Lh

Received: 21.08.2014
Revised: 30.10.2014

 English version: Quantum Electronics, 2015, 45:8, 691–696

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