Abstract:
We discuss the results of fabrication and experimental study of a high-power excimer XeCl laser for industrial applications. Compactness of the laser is achieved by the employment of a laser chamber based on a ceramic tube made of Al2O3. High laser output energy (1.5–2.5 J pulse-1) is obtained using a wide-aperture (up to 55×30 mm) volume discharge with pre-ionisation by a creeping discharge. The pre-ionisation is realised through a semitransparent electrode by the UV radiation of a creeping discharge in the form of uniform plasma sheet on a surface of a plane sapphire plate. The operating lifetime of the gas mixture amounts to ~57×106 pulses at a stabilised average laser power of 450 W. The results obtained demonstrate real prospects for developing a new class of excimer XeCl lasers with an average power of ~1 kW.
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