This article is cited in 4 papers

Extreme light fields and their applications

Fabrication of microcapillaries in fused silica using axicon focusing of femtosecond laser radiation and chemical etching

D. A. Yashunin, Yu. A. Malkov, A. N. Stepanov

Institute of Applied Physics, Russian Academy of Sciences, Nizhny Novgorod

Abstract: Fabrication of microcapillaries with a diameter of 50 — 80 μm and a length up to 2.5 mm in fused silica by axicon focusing of femtosecond laser radiation and subsequent chemical etching in a 8 % hydrofluoric acid solution is demonstrated. The etching rate is ~6 μm min^-1. It is shown that the microcapillaries have optical waveguiding properties, which testifies to the optical quality of the walls of obtained structures.

Keywords: femtosecond laser radiation, axicon focusing, microchannels, micromodification of materials, chemical etching.

PACS: 81.40.Wx, 79.20.Ds, 42.70.Ce, 42.65.Re

Received: 12.11.2012
Revised: 12.02.2013

 English version: Quantum Electronics, 2013, 43:4, 300–303

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