This article is cited in 7 papers

Lasers

Elongation of the pulse duration of ArF laser with a solid-state pump generator

S. I. Moshkunov, V. Yu. Khomich, V. A. Yamshchikov

Institute of Problems of Electrophysics of the Russian Academy of Sciences, St. Petersburg

Abstract: The possibility of increasing the pulse duration of an ArF laser (wavelength 193 nm) by using an artificial forming line with nonlinear chokes is studied. An ArF laser (maximum pulse energy 15 mJ, pulse duration 18 ns, pulse repetition rate 1 KHz) with an all-solid-state pump generator is described.

PACS: 42.55.Lt, 42.60.By, 42.60.Lh

Received: 20.01.2011

 English version: Quantum Electronics, 2011, 41:4, 366–369

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