This article is cited in 2 papers

Imaging and image processing. Holography

Some features of photolithography image formation in partially coherent light

M. A. Kitsak^a, A. I. Kitsak<sup>b

a</sup> Cooperative Association for Internet Data Analysis, University of California, San Diego
^b Belarusian State University, Department of Laser Physics and Spectroscopy, Minsk

Abstract: The coherent-noise level in projection images of an opaque-screen sharp edge, formed in the model scheme of photolithography system at different degrees of spatial coherence of screen-illuminating light is studied experimentally. The spatial coherence of laser radiation was reduced by applying a specially developed device, used as a separate functional unit in the system model. The smoothing of the spatial fluctuations of radiation intensity caused by the random spatial inhomogeneity of the initial beam intensity in the obtained images is shown to be highly efficient.

PACS: 42.25.Kb, 42.30.Va, 85.40.Hp

Received: 09.10.2009
Revised: 09.09.2010

 English version: Quantum Electronics, 2010, 40:10, 914–918

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