Abstract:
New wide single-mode strip and grating loaded (SGL) channel waveguides made of silicon nitride on the oxide buffer layer of a planar silicon-on-insulator waveguide are studied. The central 10-lm-wide strip produces a multi-mode channel waveguide and diffraction gratings with a period 0.6 lm built on the structure edges produce mode-dependent additional losses due to radiation to the surrounding medium. The optical properties of these waveguides are discussed using the results of a three-dimensional numerical simulation by the FDTD and BPM methods. It is shown that a wide SGL waveguide is quasi-single-mode one because ithas a small propagation loss (~0.3 dB cm-1) for the fundamental mode and a high (up to -20 dB cm-1) loss forthe higher order modes. The new SGL waveguides are CMOS compatible and can become basic for fabricating new photonic elements, including tunable optical filters and multi-plexers based on the multireflector technology.