Investigation of waveguide structures formed by irradiation of fused quartz with hydrogen ions
N. N. Gerasimenko, V. G. Pan'kin, K. K. Svitashev, S. A. Sokolov, G. M. Tseĭtlin
Abstract:
The effective refractive index of modes traveling in waveguides formed by irradiation of fused quartz with hydrogen ions was determined as a function of the implanted-ion dose, ion energy, and annealing temperature. The change in the refractive index Δn in the irradiated layer was estimated. Annealing in the temperature range 600–700°C reduced the waveguide thickness without altering significantly the value of Δn. Two integrated-optics components–a mode selector and a waveguide polarizer–were made from these waveguides.