V. M. Boyakov, V. M. Epikhin, B. A. Kalin, M. K. Makhatov, I. N. Nikolaev, G. N. Shishkin, “Evaporation of films of chemical elements with a neodymium glass laser”, Kvantovaya Elektronika, 1978, Volume 5, Number 7,Pages <nobr>1582

This article is cited in 2 papers

Brief Communications

Evaporation of films of chemical elements with a neodymium glass laser

V. M. Boyakov, V. M. Epikhin, B. A. Kalin, M. K. Makhatov, I. N. Nikolaev, G. N. Shishkin

Abstract: Thin films were evaporated using a quasi-cw neodymium glass laser. Thin (~10 nm) uniform-thickness films of many elements were deposited using laser radiation intensities q >1 MW/cm². These films were mainly polycrystalline.

UDC: 621.373.826.038.825.3

PACS: 68.55.+b, 81.15.Ef, 42.60.Kg

Received: 11.11.1977