Measuring the temperature and concentration secondary electrons in an argon electron-beam plasma

V. O. Konstantinov, V. G. Shchukin, R. G. Sharafutdinov

Kutateladze Institute of Thermophysics, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, Russia

Abstract: The results of temperature and concentration measurements of secondary electrons in a free jet of argon, activated in an electron beam plasma, carried out using a Langmuir double electrostatic probe. A cold plasmotron prototype with a primary beam energy of 1 keV is used obtain a jet of dense cold plasma with a transverse size of approximately 80 mm and parameters with which silicon layers may be deposited with necessary characteristics in a forvacuum pressure range.

Keywords: probe diagnostics, electron-beam plasma, hollow cathode electron gun.

UDC: 533.9.082.76

Received: 20.12.2017
Revised: 22.03.2018

DOI: 10.15372/PMTF20180514

 English version: Journal of Applied Mechanics and Technical Physics, 2018, 59:5, 867–873

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