V. A. Schweigert, M. I. Zhilyaev, I. V. Shveigert, “Modeling of a monosilane RF-discharge plasma”, Prikl. Mekh. Tekh. Fiz., 1994, Volume 35, Issue 1,Pages <nobr>13

JOURNALS // Prikladnaya Mekhanika i Tekhnicheskaya Fizika // Archive

Prikl. Mekh. Tekh. Fiz., 1994 Volume 35, Issue 1, Pages 13–21 (Mi pmtf3743)

This article is cited in 2 papers

Modeling of a monosilane RF-discharge plasma

V. A. Schweigert, M. I. Zhilyaev, I. V. Shveigert

Novosibirsk

UDC: 537.525

Received: 03.03.1993

English version: Journal of Applied Mechanics and Technical Physics, 1994, 35:1, 13–20