V. A. Seleznev, V. Ya. Prinz, V. M. Aniskin, A. A. Maslov, “Generation and registration of disturbances in a gas flow. 1. Formation of arrays of tubular microheaters and microsensors”, Prikl. Mekh. Tekh. Fiz., 2009, Volume 50, Issue 2,Pages <nobr>145

This article is cited in 8 papers

Generation and registration of disturbances in a gas flow. 1. Formation of arrays of tubular microheaters and microsensors

V. A. Seleznev^a, V. Ya. Prinz^a, V. M. Aniskin^b, A. A. Maslov^b

^a Institute of Semiconductor Physics, Siberian Division, Russian Academy of Sciences, Novosibirsk, 630090, Russia
^b Khristianovich Institute of Theoretical and Applied Mechanics, Siberian Division, Russian Academy of Sciences, Novosibirsk, 630090, Russia

Abstract: A new method is proposed for creating “smart” surfaces for suppressing turbulence and retaining a laminar supersonic flow. Methods of formation of super-fast-response sensors and actuators for such surfaces are developed. Such sensors and actuators are structurally designed as microtubes made of SiO$_2$/Si$_3$N$_4$/Au and InGaAs/GaAs/Au heterofilms and suspended above a substrate; the wall thickness of these tubes is in the nanometer range; the tubes are connected to electrical contacts. Models of distributed arrays of tubular microsensors and microactuators are fabricated in a single technological process, which involves the well-established planar technology and the technology of rolling of stressed heterofilms.

Keywords: tubular sensors and actuators, arrays of microtubes, flow control.

UDC: 533

Received: 25.10.2007
Accepted: 24.12.2007