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JOURNALS // Pisma v Zhurnal Tekhnicheskoi Fiziki // Archive
Pisma v Zhurnal Tekhnicheskoi Fiziki, 1985 Volume 11, Issue 17, Pages 1048–1053 (Mi pjtf979)
High-voltage electron lithography through the pattern former

K. A. Valiev, L. V. Velikov, R. Kh. Makhmutov, A. M. Prokhorov

General Physics Institute of the Academy of Sciences of the USSR, Moscow

Received: 20.06.1985



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