RUS
ENG
Full version
JOURNALS
// Pisma v Zhurnal Tekhnicheskoi Fiziki
// Archive
Pisma v Zhurnal Tekhnicheskoi Fiziki,
2026
Volume 52,
Issue 4,
Pages
37–41
(Mi pjtf9732)
Ýëåêòðîííî-ìèêðîñêîïè÷åñêèé àíàëèç çîíû êîíòàêòà ïëàçìåííîå ïîêðûòèå–ïîäëîæêà
I. V. Baklushina
a
,
V. E. Gromov
a
,
Yu. F. Ivanov
b
,
I. Yu. Litovchenko
c
,
A. S. Chapaykin
a
a
Siberian State Industrial University, Novokuznetsk
b
Institute of High Current Electronics, Siberian Branch of the Russian Academy of Sciences, Tomsk
c
Institute of Strength Physics and Materials Science, Siberian Branch of the Russian Academy of Sciences, Tomsk
Received:
25.06.2025
Revised:
28.10.2025
Accepted:
28.10.2025
DOI:
10.61011/PJTF.2026.04.62324.20416
Fulltext:
PDF file (1849 kB)
©
Steklov Math. Inst. of RAS
, 2026