Abstract:
The thickness dependence of the lattice rotation rate (gradient) in submicron spherulitic films of lead zirconate titanate (PZT) was studied using the electron backscatter diffraction method. Analysis of the lattice rotation rate dependence on the thickness showed that a decrease in the PZT layer thickness leads to the appearance of plastic deformation; the mechanisms of its formation are discussed.
Keywords:spherulitic microstructure, lead zirconate titanate thin films, rotational crystals, electron backscatter diffraction.