V. V. Lundin, A. E. Nikolaev, A. V. Sakharov, P. N. Brunkov, E. E. Zavarin, A. F. Tsatsul'nikov, “High growth rate of AlN in a planetary MOVPE reactor”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 2010, Volume 36, Issue 24,Pages <nobr>33

This article is cited in 4 papers

High growth rate of AlN in a planetary MOVPE reactor

V. V. Lundin, A. E. Nikolaev, A. V. Sakharov, P. N. Brunkov, E. E. Zavarin, A. F. Tsatsul'nikov

Ioffe Institute, St. Petersburg

Abstract: AlN growth in a low-scale production AIX2000HT MOVPE system was studied. The dependence of the growth rate on ammonia flow was shown to be of a threshold nature originating from gas-phase parasitic reactions. An AlN growth rate up to 8.6 $\mu$m/h under optimized reactor conditions was demonstrated.

Received: 12.07.2010